New Reliability Test Option
ACS V4.4 supports an updated optional reliability test module (Model
ACS-2600-RTM) that simplifies creating and executing complex
stress-measure-analyze test sequences used in device reliability tests, such as
HCI, TDDB, NBTI, J-Ramp, and more. This updated software module gives
semiconductor test engineers doing device reliability testing and analysis in
R&D or production test environments the tools they need to test more
productively, whether they're characterizing single devices or managing high device
count test applications. ACS helps users manage complex system instrumentation
configurations, quickly define test parameters common to large groups of
devices or many sub-groups, execute tests with run-time results feedback, and
begin analyzing large datasets of measurement results sooner.
In order to respond to the high-speed behaviors associated with
semiconductor device failure mechanisms and produce the masses of data
associated with reliability testing of multiple devices in parallel, each source measurement unit (SMU) instrument in a
test configuration must not only be fast, but all SMU channels working as a
group or several sub-groups must be fast as well. For reliability test applications
of this type, the Model ACS-2600-RTM is designed to maximize the performance of
Keithley's Series 2600A System SourceMeter® instruments, which combine powerful
embedded scripting capability (through the use of on-board Test Script
Processors) with multi-unit integration via the TSP-Link® high-speed inter-unit
communication bus. ACS leverages the inherent speed of Series 2600A
instruments, accelerating the system reconfiguration process, uploading test
conditions and scripts to the embedded processors in individual instruments,
and beginning execution quickly. Test engineers have the flexibility of using
ACS and the optional Model ACS-2600-RTM with individual Series 2600A units or
with Keithley's S500 Integrated Test Systems.
The updated reliability test module also provides other important
advantages for device reliability testing. For example, dynamic limit current
protects devices under test from severe damage by reducing the maximum
breakdown current possible during the progress of the test sequence. In
addition, device reliability test sequences can require hours, days, or even
weeks to complete, producing enormous amounts of measurement data. The Model
ACS-2600-RTM reliability test module provides compression techniques that allow
the test system to capture the most important measurement results while
continuing to make measurements over these extended periods.
Support for Additional Pulse-Measure Units for Ultra-Fast BTI Testing
Owners of Keithley's Model 4200-SCS parameter analyzer can now make use
of all six of the pulse-measure units (Model 4225-PMU) that system supports for
ultra-fast bias temperature instability (BTI) testing. Previously, ACS
supported operating a maximum of four units at once. The ACS V4.4 update allows
testing more devices in parallel for higher system utilization and faster
acquisition of BTI data.
Support for Keithley's Newest SMU, Optimized for High Power Testing
The ACS V4.4 upgrade provides support for the Model 2651A High Power
System SourceMeter instrument, the latest addition to the Series 2600A line.
This instrument's high current capability (up to 50A at 40V) is critical to
labs and fabs involved in the development and production of vertical structure
power components like insulated gate bipolar transistors (IGBTs)
and double-diffused metal-oxide semiconductors (DMOSs).
New Projects for Emerging Device Technologies
ACS V4.4 includes several turnkey test projects designed to address high
voltage reliability, charge pumping, Wafer
Level Reliability (WLR) with specified pulse/AC stress, and
stress migration (reliability) testing. Many users will be able to employ these
projects as provided; for others, they offer a starting point that can help
them develop their own custom test projects more quickly.
ACS Test Environment Background
ACS combines multiple instruments used for semiconductor device
characterization and parametric measurements into a unified test environment
optimized for flexibility, speed, and productivity in testing and analysis. Its
intuitive GUI helps novice users test devices productively almost immediately,
regardless of their level of test programming experience. The GUI simplifies configuring
test instrumentation, setting measurement parameters, making I V measurements,
and displaying results. Even infrequent users can go from creating a new test
setup to characterizing new devices in a fraction of the time older test
development approaches require. Just as important, ACS provides all the tools
needed to set up tests, analyze data, and export results—without ever leaving
the ACS environment. ACS also simplifies integrating a variety of popular
semiautomatic and fully automatic wafer probe stations into a test setup.
Price and Availability
ACS V4.4 and the Model ACS-2600-RTM Wafer Level Reliability Option are
available at U.S. list prices of $12,800 and $6400, respectively. Those using
previous versions of ACS should contact their Keithley representative for
assistance regarding ACS upgrades.
For More Information
To learn more, visit www.keithley.com/products/semiconductor/characterizationsoftware/ACS2600RTM
About Keithley Instruments, Inc.
With more than 60 years of measurement expertise, Keithley Instruments
has become a world leader in advanced electrical test instruments and systems.
Our customers are scientists and engineers in the worldwide electronics industry
involved with advanced materials research, semiconductor device development and
fabrication, and the production of end products such as portable wireless
devices. The value we provide them is a combination of products for their
critical measurement needs and a rich understanding of their applications to
improve the quality of their products and reduce their cost of test. In 2010,
Keithley Instruments joined Tektronix as part of its test and measurement
portfolio.